Patrick Bernard Verdonck patrick@lsi.usp.br

Laboratório de Sistemas Integráveis Av. Prof. Luciano Gualberto Trav.3 N.158 05508-900 - São Paulo - SP Brazil Phone :+55-11-3091 5666    Fax :+55-11-3091 5665

These are my current ocupations and positions

• Head of the Plasma Etch Group of the Division of Integrated Microstructures

These are the projects with which I'm involved

• Plasma etching of deep trenches in silicon
• Characterization of Plasmas with Electrostatic Probes and Emission Spectroscopy
• Design and Manufacturing of new Plasma Etch Reactors
• Reliability in Microelectronics

These are institutions and people related to my work

• Ronaldo D. Mansano, DMI, LSI, PSI, EPUSP, Brazil
• Giuseppe A. Cirino, DMI, LSI, PSI, EPUSP, Brazil
• Homero S. Maciel, ITA, CTA, São Jose dos Campos, Brazil
• Jacobus W. Swart, DSIF - FEE - Unicamp, Campinas, Brazil
• IMEC - Leuven, Belgium
• The University of Pennsylvania - Philadelphia, PA, USA

These are my areas of interest

• Plasma Etching
• Lithography
• Sensors and Actuators
• MOS technology and devices

What I have done before

Research

• Plasma etching on different materials related to MOS-IC processing
• The use of excimer lasers in IC processing

This is my Academic Formation

• Electrical Engineering Degree from the Katholieke Universiteit Leuven, Belgium
• Ph.D. in Electrical Engineering from the UNICAMP, Brazil

Something else besides academics ?

• Sports - unfortunately less active than I would like ...