Patrick Bernard Verdonck

These are my current ocupations and positions

Head of the Plasma Etch Group of the Division of Integrated Microstructures

These are the projects with which I'm involved

Plasma etching of deep trenches in silicon

Characterization of Plasmas with Electrostatic Probes and Emission Spectroscopy

Design and Manufacturing of new Plasma Etch Reactors

Reliability in Microelectronics

These are institutions and people related to my work

Ronaldo D. Mansano, DMI, LSI, PEE, EPUSP, Brazil

Giuseppe A. Cirino, DMI, LSI, PEE, EPUSP, Brazil

Homero S. Maciel, ITA, CTA, São Jose dos Campos, Brazil

Jacobus W. Swart, DSIF - FEE - Unicamp, Campinas, Brazil

IMEC - Leuven, Belgium

The University of Pennsylvania - Philadelphia, PA, USA

These are my areas of interest

Plasma Etching

Lithography

Sensors and Actuators

MOS technology and devices

What I have done before

Research

Plasma etching on different materials related to MOS-IC processing

The use of excimer lasers in IC processing

This is my Academic Formation

Electrical Engineering Degree from the Katholieke Universiteit Leuven, Belgium

Ph.D. in Electrical Engineering from the UNICAMP, Brazil

Something else besides academics ?

Sports - unfortunately less active than I would like ...

LSI

Patrick Bernard Verdonck
Work address:
Laboratório de Sistemas Integráveis
Av. Prof. Luciano Gualberto Trav.3 N.158
Cidade Universitária
CEP: 05508-900 - São Paulo - SP
Brazil
Phone: x55-11-818-5666
E-Mail: patrick@lsi.usp.br