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Lista
de Publicações no MESTRADO.
C. E. Viana, A. N. R. Silva and N. I. Morimoto; "Argon
flow Effects in the PETEOS-SiO2 Thin Films Characteristics".
ICMP 99, p. 33-6 Aug., Campinas, Brazil, 1999.
A. N. R. Silva, C. E. Viana and N. I. Morimoto; "Characterization
of Silicon Oxide Thin Films Deposited By TEOS-PECVD."
4th Brazilian Symposium on Glasses and Related Materials,
November, Minas Gerais, Brazil, 1999.
C. E. Viana, A. N. R. Silva and N. I. Morimoto; "Structural
Analysis of SiO2 Thin Films Deposited by PECVD Using an
Oxygen-TEOS-Argon Mixture." XX CBRAVIC p. 45, Jul.,
IFUSP, São Paulo, Brazil, 1999.
C. E. Viana, N. I. Morimoto and O. Bonnaud "Annealing
Effects in the PECVD SiO2 Thin Films Deposited Using TEOS,
Ar and O2 Mixture" X Workshop on "Dielectrics
in Microelectronics", November, Barcelona, Spain, 1999.
C. E. Viana, A. N. R. Silva and N. I. Morimoto; "Argon
Influence in the PETEOS Silicon Oxide Deposition Process";
ICMP 98 p. 481-3, August, Curitiba, Brazil, 1998.
C. E. Viana and N. I. Morimoto; "Development of a Low
Temperature High Quality Silicon Oxide Deposition Process";
ICMP 98, p. 481-3, August, Curitiba, Brazil, 1998.
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